Belt transfer system

KT3100B 75mm/150mm
Belt transfer system

Meteor series are readily available to enhanced the process capability of this system. Automated photolithography processing system PC-Controller operation / process recipe user programmable Operator mode / Engineer mode / Supervisor mode.

• Developer & Photo resist spinner & Bake
  
• SOG Process system & Bake
  
• Saw Filter Process & Bake
  
• Wafer Scrubber spinner & Bake
  
• MEMS Process system
  

Indexer Module Feature

• The Teflon coated indexer is stepper motor driven for precision .
  
• Wafer sensing is accomplished through either fiber optic sensor.
  

Chill Plate Modules Feature

• 18-30 Deg Temp Range
  
• Proximity Bake Type
  
• 3 Pin Cylinder up/down

Spin Modules Feature

• AC Servo Brushless Motor
  
• Auto wafer centering function
  
• Programmable Auto Photoresist Dispense
  
• Stepper Motor Dispense ARM
  
• TEBR & BEBR Rinse Function
  
• Spin Environment for Processing Catch cup
  
• Resist Waste containment
  
• ± 1 RPM High Accuracy at all process rpm
  
• Low contamination Vacuum chuck
  

HMDS Prime Plate Modules Feature

• 50-200Deg Temp Range
  
• Proximity software control
  
• Using Bubbled Nitrogen In low pressure canister
  
• 3 Pin Cylinder up/down

Hot Plate Modules Feature

• 50-200Deg Temp Range
  
• Stepper Motor Bake
  
• Proximity software control
  
• 3 Pin Cylinder up/down