KT2000S

100mm/150mm

Upgrade for water belt transfer track by KS Tech KT2000S series are readily available to enhanced the process capability of this system.
Automated photolithography processing system PC-Controller operation / process recipe user programmable Operator mode / Engineer mode / Supervisor mode.
Photoresist coater module, Developer module, HMDS bake and chill plate module.

• The coater module dispense arm position is programmable, and the spindle assembly has computer controller chuck Height.
  
• The KS Tech catch cup assembly that incorporate an automatic bowl rinse.
  
• The rinse cycle is a process programmable variable and can be executed during any desirable point before, during or after production.
  
• Desirable process benefits of the catch cup are the elimination of mist and improved uniformity.
  
  

Developer Module Features

• The new designed developer bowl has exhaust which provides improved uniformity. Low impact nozzle are also used to improve uniformity.
  
• Dispense function and dispense arm position are controlled from the user interface computer.
  
  

Chill Plate Modules Feature

• 18-30 Deg Temp Range
  
• Proximity Bake Type
  
• 3 Pin Cylinder up/down

HMDS / HPO / Chill Plate Module Features

• The hot plate and the chill plate interchangeable and and require only a simple replacement of the heat transfer element.
  
• Hot plate and chill plate temperature are user specified within the recipe.
  
• As an option the hot plate and chill plate is offered with fixed gap proximity bake and cooling.
  

Hot Plate Modules Feature

• The Teflon coated indexer is stepper motor driven for precision.
  
• Wafer sensing is accomplished through either fiber optic sensor.