KT3000R

KT3000R 100mm/150mm

New robot transfer track by KS Tech KT3000R series are readily available to enhanced the process capability of this system.
Automated photolithography processing system PC-Controller operation / process recipe user programmable Operator mode / Engineer mode / Supervisor mode.
Photoresist coater module, Developer module, HMDS bake and chill plate module system diagnostics and analysis are simple, just as they should be. Diagnostics can be run at the user interface or at remote terminal.

All motors are brushless servo
All sensor are digital
All PC board are eliminated from module sites
New components improve KS TECH track System?
Improved robotic arm mechanism
Available in custom configuration to meet roduction needs

Robot arm Module Features

• Robotic hardware utilizes low particulate single action movement and is operated with precision stepper.
  
• All positioning is determined and then remotely set digitally.
  
  

Coater Module Features

• The coater module dispense arm position is programmable, and the spindle assembly has computer controller chuck Height.
  
• The KS TECH catch cup assembly that incorporate an automatic bowl rinse.
  
• The rinse cycle is a process programmable variable and can be executed during any desirable point before, during or after production.
  
• Desirable process benefits of the catch cup are the elimination of mist and improved uniformity
  
  

Developer Module Features

• The new designed developer bowl has exhaust which provides improved uniformity.
  
• Low impact nozzle are also used to improve uniformity.
  
• Dispense function and dispense arm position are controlled from the user interface computer.
  
  

HMDS / HPO / CHILL Plate Module Features

• The hot plate and the chill plate interchangeable and and require only a simple replacement of the heat transfer element.
  
• Hot plate and chill plate temperature are user specified within the recipe.
  
• As an option the hot plate and chill plate is offered with fixed gap proximity bake and cooling.
  
  

Indexer Modules Feature

• The Teflon coated indexer is stepper motor driven for precision.
  
• Wafer sensing is accomplished through either fiber optic sensor.