Restored Track System

KS Tech excel in complete restoration of enhancement wafer track system. In addition to ensuring that every interior and exterior aspect of the system is restored. New upgrade parts and new enhanced modules are provided as part of the standard restoration process.
All upgrade are tested so that our customer will benefit from the new technologies. Improved coater & Developer catch cup.

Redesigned Develop insert cup and air ring.
KS Tech Hot Plate Oven controller microprocessor-based .
New spindle and digital controller for better resist thickness control.
KS Tech digital vacuum switch. All motors are brushless servo or brush motor.
All sensor are digital sensor. New components improve KS Tech track System's.

System option Features

• programmer or each track has its own independent microprocessor controls
  
• Humidity control in Process module
  
• System Total environment
  
• Chemical resistant construction
  
• Optional dual cassette load and unload indexers
  
• Programmable Exhaust controller
  
• Photoresist Microprocessor controller pump
  
• Chemical Dispense cabinet
  
  

KS Tech refurbished systems include the following

• New Teflon insulated electrical wiring
  
• New Teflon fluid lines
  
• New catch cup for develop and coater cup
  
• All new fittings, solenoids, metering and pneumatic valves
  
• All new switches such as micro switches and vacuum switches
  
• All new bearings
  
• All new motors
  
• All commercially available parts are replaced
  
• All plated and painted surfaces are cleaned or replaced to like new condition
  
• Each module and subassembly is disassembled, inspected, chemically or ultrasonically cleaned and reassembled to OEM specifications
  
• Each printed circuit board is tested on our exclusive test fixtures
  
• All parts, assemblies, and printed circuit boards are compatible with those of the original equipment manufacturer
  
• All systems are completely tested prior to shipment including a wet test and 1000 wafer dry test
  
• All new cabinet skins with electropolished SST